Use of compositionally modulated multilayer thin films as resistive material
US4766411A · kind A · utility
23Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 1986 |
| Grant date | Aug 23, 1988 |
| Priority date | — |
| Expiry date | May 29, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01C17/232
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A compositionally modulated multilayer thin film material system for use as a resistive material in metal film resistors wherein at least two different metallic compositions having good resistive properties are deposited alternately in thin film layers on a substrate, the resulting film having improved TCR & TCR Slope characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.