Carry device for fine movement
US4766465A · kind A · utility
43Cited by
3References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 26, 1986 |
| Grant date | Aug 23, 1988 |
| Priority date | — |
| Expiry date | Nov 26, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/102
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A carriage for fine movement includes a stationary stage, a movable stage slidably provided thereon, a moving mechanism, coupled to the stationary and movable stages, for moving the movable stage relative to the stationary stage, wherein at least one of the stationary stage, movable stage and moving mechanism is of a fine ceramic material to prevent distortion and variation with time to enhance the abrasion resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.