Forceps for semiconductor silicon wafer
US4767142A · kind A · utility
Inventors
Key dates
| Filing date | Mar 25, 1987 |
| Grant date | Aug 30, 1988 |
| Priority date | — |
| Expiry date | Mar 25, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T403/32311
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A vacuum-forceps is disclosed. A valve chamber is provided between a first suction passage communicating with an adsorptive member and a second suction passage connected through a suction tube to a vacuum source. A valve member linked to an operating push button is accomodated in the valve chamber. The adsorptive member is rotatable and swayable relative to a forceps body with the aid of a spherical member. A suction tube is connected through a double-coupling to the forceps body. A bypass is provided between the valve chamber and the first suction passage. A semiconductor silicon wafer is adsorbed on an adsorptive plate provided at the tip end of the adsorptive member by actuating the push button and is then moved to a desired position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.