Plasma treatment apparatus

US4767641A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Jorg Kieser · Albstadt, DE
• Michael Sellschopp · Hammersbach, DE
• Michael Geisler · Apolda, DE

Key dates

• Filing date: Jul 3, 1986
• Grant date: Aug 30, 1988
• Expiry date: Jul 3, 2006

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J37/32541
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

Device for the plasma treatment of substrates (7) in a high frequency-excited plasma discharge between two electrodes (3, 8), supplied by a high-frequency source (6). The first electrode is constructed as a hollow anode (3) and the second electrode (8), which carries the substrate (7), is deposited in front of the hollow space (10) of the hollow anode or can be passed by this. Moreover, the hollow anode (3) has an edge (9), which is drawn out in the direction of the second electrode (8) and which, relative to the second electrode, forms a gap s.sub.1 all around that does not exceed 10 mm in width. In order to form the electrode so that the gap width is not a critical feature, projections (12) are disposed in the hollow space (10) of the hollow anode (3), said projections increasing the internal surface area (11) of the hollow anode (3). Preferably, these projections (12) are constructed as rib structures, which may also assume a honeycomb form.