Boat for liquid phase epitaxial growth
US4768463A · kind A · utility
9Cited by
3References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 1986 |
| Grant date | Sep 6, 1988 |
| Priority date | — |
| Expiry date | Sep 8, 2006 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B19/063
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A solution for crystal growth reserved in an upper chamber is taken from an opening formed in a slider mounted between the upper chamber and a middle chamber, and flown to the middle chamber containing a substrate, solid bodies in the solution being removed by two grids attached to a hole provided on the side of the middle chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.