Silicon micromachined non-elastic flow valves
US4768751A · kind A · utility
37Cited by
8References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 19, 1987 |
| Grant date | Sep 6, 1988 |
| Priority date | — |
| Expiry date | Oct 19, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve assembly for controlling fluid flow includes a valve plate and a nozzle plate which are not attached to each other but can be moved into and out of contact with each other. The valve plate has an opening for passing an actuator and fluid. A nozzle plate has an opening for passing fluid and the opening is aligned with a mesa on the valve plate which can seal the nozzle orifice. The actuator separates the nozzle plate from the valve plate to permit fluid flow and a spring means brings the nozzle plate into a closed position against the valve plate to stop fluid flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.