High-purity metal and metal silicide target for LSI electrodes
US4770948A · kind A · utility
22Cited by
4References
12Claims
0Family size
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Key dates
| Filing date | Jun 23, 1986 |
| Grant date | Sep 13, 1988 |
| Priority date | — |
| Expiry date | Jun 23, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
There is provided a high-purity molybdenum target or high-purity molybdenum silicide target for LSI electrodes which comprises a high-purity metallic molybdenum having an alkali metal content of not more than 100 ppb and a radioactive element content of not more than 10 ppb. Further, a process is provided for producing such target comprising a wet purification processing followed by a series of dry processings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.