Surface inspection apparatus
US4772127A · kind A · utility
6Cited by
3References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 18, 1984 |
| Grant date | Sep 20, 1988 |
| Priority date | — |
| Expiry date | Dec 18, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/0833
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In the surface inspection apparatus disclosed herein, an elongate array of electro-optical shutters is interposed between a laser beam which scans across the surface to be inspected and a photodetector system which collects light scattered from the surface along the scan line. The shutters are operated in a shifting pattern in synchronism with the scanning means thereby to block unwanted regular signal components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.