Patent · US Expired

Method for etching materials

US4772365A · kind A · utility

5Cited by
7References
10Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 12, 1986
Grant dateSep 20, 1988
Priority date
Expiry dateNov 12, 2006

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23F1/16
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

In a method for etching material to be etched, which consists at least partly of metal, an acid is used, which attacks the metal solely after the addition of an oxidizing agent directly before the actual etching operation. The addition of the oxidizing agent takes place in a quantity which slightly exceeds the quantity stoichiometrically necessary for removing the entire metal, so that a small residue of oxidizing agent remains in the etching medium dropping from the material to be etched. This residual oxidizing agent is then removed from the etching medium by a special device, which contains an excess of metal able to be etched by the etching medium.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.