Media isolated differential pressure sensors
US4773269A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 1986 |
| Grant date | Sep 27, 1988 |
| Priority date | — |
| Expiry date | Jul 28, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S73/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A deflecting diaphragm differential pressure sensor is formed so all electrical elements and connections from external circuitry to the sensor are isolated from the pressure media. The deflecting, pressure sensing diaphragm is made of a semi-conductor material, having piezoresistors disposed on a surface thereof to form strain gages to sense deflection of the diaphragm. The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.