Patent · US Expired

Wafer handler

US4773687A · kind A · utility

44Cited by

7References

12Claims

0Family size

Assignee

American Telephone and Telegraph Company, AT&T Technologies, Inc. · US

Inventors

Donald R. Bush · Marshalltown, US
Gary Reichl · Coopersburg, US

Key dates

Filing date	May 22, 1987
Grant date	Sep 27, 1988
Priority date	—
Expiry date	May 22, 2007

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/141
WIPO fieldHandling
WIPO sectorMechanical engineering

Abstract

A wafer handling technique allows for picking up a wafer from its front side. One or more vacuum ports pull the periphery of the wafer into contact with a ledge raised from a broad surface, providing a friction force that prevents lateral movement of the wafer. A port in the broad surface of the handler flows pressurized gas onto the wafer, thereby preventing contact between the handler and the interior of the wafer. The handler may be sized to be relatively thin, and to cover less than half of the surface of the wafer, thereby allowing for readily loading wafers back-to-back in a furnace boat.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.