Optical spot scanning system for use in three-dimensional object inspection
US4775235A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 29, 1986 |
| Grant date | Oct 4, 1988 |
| Priority date | — |
| Expiry date | Dec 29, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical spot scanning system for use in three dimensional measurement and inspection of an object surface wherein a deflector means is placed in the path of the projection axis of the spot projector to deflect the portion of same between the deflector and the object surface, thereby moving the spot to various positions on the object surface, and wherein the deflector means is also positioned in the path of the optical axis of the system sensing means to deflect the portion of same between the sensing means and the object surface by the same degree as the portion of the projection axis is deflected, thereby ensuring the axes portions which are aligned to be coplanar remain coplanar, and that the image of the spot on the object surface will be properly conveyed to the linear sensor array in the sensing means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.