Right angle driving
US4777372A · kind A · utility
5Cited by
6References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 8, 1986 |
| Grant date | Oct 11, 1988 |
| Priority date | — |
| Expiry date | May 8, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A platform for positioning inside an evacuated chamber is slidable in a y--y direction along a movable support member that is movable along an x--x direction perpendicular to the y--y direction. The movable support member is formed with end bearings that ride along a y-drive shaft that carries a first helical gear for meshing with a second orthogonal helical gear that rotates a feed screw accommodated by a threaded opening in the platform. An electric motor is coupled to the y-drive shaft through the wall of the evacuated housing with a vacuum sealing assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.