Leak detector and leak detection method

US4779449A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Werner G. Bley · Bonn, DE
• Gunter Reich · Cologne, DE

Key dates

• Filing date: Oct 15, 1987
• Grant date: Oct 25, 1988
• Expiry date: Oct 15, 2007

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/202
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Leak detector operating according to the countercurrent principle is used in a leak detection method and includes a first high vacuum pump having an inlet which is connected to an inlet of the leak detector, a second high vacuum pump having an inlet which is connected to a mass spectrometer, and a first roughing pump having an inlet which is connected to the outlets of the first and second high vacuum pump respectively. In order, on the one hand, to detect particularly large leaks and, on the other hand, avoid overloads due to high test gas concentrations, a second roughing pump is provided having an inlet which may be selectably connected to one of the inlet of the leak detector via a conduit equipped with a control valve and to the inlet of the first roughing pump by way of a conduit equipped with a choke.