Microchannel plate and a method for manufacturing the same
US4780395A · kind A · utility
27Cited by
6References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 27, 1987 |
| Grant date | Oct 25, 1988 |
| Priority date | — |
| Expiry date | Jan 27, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/34
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microchannel plate has a platelike photosensitive glass substrate and a plurality of microchannels formed separately from each other and extending across the thickness of the substrate. A secondary electron-emission surface is formed on an inner surface of each of the microchannels. Accelerating electrodes formed on two opposite sides of the photosensitive glass substrate, so as to be partially in electrical contact with the secondary-emission surface. The microchannels are formed by applying ultraviolet rays to the substrate through a mask and removing irradiated portions of the substrate by etching.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.