Mist supplying device for forming thin film
US4783006A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Jun 30, 1987 |
| Grant date | Nov 8, 1988 |
| Priority date | — |
| Expiry date | Jun 30, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C4/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mist supplying device for supplying a film-forming solution to form a thin film on a substrate includes a nozzle having an elongate outlet port, an atomizer coupled to the nozzle for atomizing the film-forming solution, and a disperser movably disposed in the nozzle between the outlet port and the atomizer and having a plurality of substantially uniformly distributed mist passages for passing the atomized film-forming solution in a first flow passage direction therethrough. An air blower is coupled to the atomizer for delivering the atomized film-forming solution into the nozzle. A driver unit is coupled to the disperser for reciprocally moving the mist passages in a second flow passage direction transverse to the first flow passage direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.