Rapid synthesis of indium phosphide
US4783320A · kind A · utility
5Cited by
9References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 25, 1985 |
| Grant date | Nov 8, 1988 |
| Priority date | — |
| Expiry date | Nov 25, 2005 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T117/1012
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for the high pressure synthesis of InP using an independent temperature control of a three zone furnace incorporating a heat pipe provides a stable temperature profile throughout the synthesis cycle. Internal/external pressure control of the quartz ampoule is maintained by use of a water cooled baffle and a temperature/pressure balancing program. Complete synthesis is achieved in less than five hours.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.