Method for manufacturing electrical contacts for a thin-film semiconductor device
US4783421A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1987 |
| Grant date | Nov 8, 1988 |
| Priority date | — |
| Expiry date | Jun 29, 2007 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/94
Abstract
A method of fabricating spaced-apart back contacts on a thin film of semiconductor material by forming strips of buffer material on top of the semiconductor material in locations corresponding to the desired dividing lines between back contacts, forming a film of metal substantially covering the semiconductor material and buffer strips, and scribing portions of the metal film overlying the buffer strips with a laser without contacting the underlying semiconductor material to separate the metal layer into a plurality of back contacts. The buffer material serves to protect the underlying semiconductor material from being damaged during the laser scribing. Back contacts and multi-cell photovoltaic modules incorporating such back contacts also are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.