Patent · US Expired

Method of producing a passive optical device including at least one reflection grating

US4784935A · kind A · utility

54Cited by

3References

9Claims

0Family size

Assignee

Kernforschungszentrum Karlsruhe GmbH · DE

Inventors

Wolfgang Ehrfeld · Karlsruhe, DE
Dietrich Munchmeyer · Blankenloch, DE

Key dates

Filing date	Apr 1, 1987
Grant date	Nov 15, 1988
Priority date	—
Expiry date	Apr 1, 2007

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S430/168
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A method of producing a passive optical device having optical components including at least one reflection grating, at least one port for polychromatic light and a plurality of ports for monochromatic light. The method includes producing the optical components of the device utilizing X-ray depth lithography so that the grating lines of the reflection grating are parallel to the direction of X-ray radiation emitted as part of the X-ray depth lithography.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.