Secondary electron detector for use in a gaseous atmosphere
US4785182A · kind A · utility
43Cited by
3References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 1987 |
| Grant date | Nov 15, 1988 |
| Priority date | — |
| Expiry date | May 21, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24507
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention provides for a device for generating, amplifying and detecting secondary electrons from a surface of a sample. The device may comprise a scanning electron microscope. The invention also provides for a method for generating, amplifying and detecting secondary electrons from a surface of a sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.