Surface defect detection and confirmation system and method
US4794264A · kind A · utility
54Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 1987 |
| Grant date | Dec 27, 1988 |
| Priority date | — |
| Expiry date | May 8, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9506
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection defect detection and confirmation technique in which a beam of radiation is directed at the surface to be inspected; the radiation scattered from the surface is separately sensed in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw, the near-specular region signal and far-specular region signal are normalized, the near-specular component is discriminated, and the flaw signal is indicated as being a defect and not contamination when there is coincidence between the pit signal and flaw signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.