Patent · US Expired

Surface pit detection system and method

US4794265A · kind A · utility

74Cited by
5References
21Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 8, 1987
Grant dateDec 27, 1988
Priority date
Expiry dateMay 8, 2007

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N21/9506
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An apparatus and method for uniquely detecting pits on a smooth surface by irradiating an area of the surface; separately sensing radiation scattered from the surface in the near-specular region indicative of a pit and in the far-specular region indicative of a flaw and producing signals representative thereof; normalizing the near-specular signal with respect to the far-specular signal to indicate a pit; and discriminating the near-specular components of the normalized signal representative of surface pits.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.