Patent · US Expired

Semiconductor memory device having a high capacitance storage capacitor

US4794563A · kind A · utility

38Cited by
6References
8Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 31, 1986
Grant dateDec 27, 1988
Priority date
Expiry dateOct 31, 2006

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/665

Abstract

This invention provides a semiconductor memory device for an integrated circuit comprising a semiconductor substrate of a first conductivity type, a field insulation layer on the semiconductor substrate, and a switch. This switch includes a gate insulation layer, a gate electrode on the gate insulation layer, and a pair of impurity regions of a second conductivity type in the substrate adjacent to the gate electrode. The device also includes a capacitor including a first electrode connected to one impurity region, a second electrode connected to a predetermined voltage, insulation means for separating the first and second electrodes, and groove means extending into the substrate for increasing the capacitace area of the first electrode. A method for making the devices is also described.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.