Pressure transducer with stress isolation for hard mounting
US4800758A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 1986 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Jun 23, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer has a stress isolator layer which permits the sensor to be non-resiliently mounted (hard mounted) to a mounting surface that in turn is subjected to strain. The strain of the mounting surface tends to induce undesired stress in the sensing diaphragm, and the present stress isolator layer minimizes the amount of stress that is transferred to the measuring diaphragm, to thereby reduce error. The spring preferably comprises a silicon leaf0type spring, with or without isolating slots, and is used in various combinations of diaphragms that are sensitive to pressure. The deflection of the diaphragm in response to pressure can be measured in any desired known manner such as with strain gage resistors, or through capacitive sensing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.