Device for transferring semiconductor wafers
US4801168A · kind A · utility
7Cited by
6References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 1986 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Apr 18, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An improved semiconductor wafer transferring device lifts and drops at least two groups of semiconductor wafers at different times in each lifting or dropping cycle, in order to reduce the impact sustained by a semiconductor wafer holder such as a wafer boat in the former case and preventing the semiconductor wafer holder from being lifted in the latter case.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.