Arylsiloxane/silicate compositions useful as interlayer dielectric films
US4801507A · kind A · utility
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10References
9Claims
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Key dates
| Filing date | Jul 2, 1987 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Jul 2, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Oligomers and polymers, useful as interlayer dielectric films, are formed by the co(hydrolysis/condensation) of an aryl group-containing trifunctional silanetriol or derivative with a tetrafunctional silicic acid compound. The respective tri- and tetrafunctional substituents on either silicon compound reaction are chosen so that they act as reactants in condensation oligomerization or polymerization reactions with the substituents on the other reactant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.