Ion source operating by surface ionization in particular for providing an ion probe
US4801849A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Nov 6, 1987 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Nov 6, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J27/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion source is described, including a source of neutral particles which arrive at an ionization support positioned inside a chamber which is closed by a cap and which includes lateral walls. The cap includes an outlet orifice opposite which a plate defines a main ionization active surface. An electric field is applied between said device and by an electrode place downstream from the orifice in the direction of ion emission and fitted with a corresponding opening. Overall, the ionization support defines, by virtue of its active surface, and by virtue of holes surrounding said central active surface, a baffle assembly which prevents neutral atoms from passing directly to the outlet orifice, and which contributes to a high degree of ionization.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.