Microwave excited excimer laser and method
US4802183A · kind A · utility
18Cited by
0References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1982 |
| Grant date | Jan 31, 1989 |
| Priority date | — |
| Expiry date | Apr 7, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A microwave pumped excimer laser and method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.