Double wall fast cool-down furnace
US4802441A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 1987 |
| Grant date | Feb 7, 1989 |
| Priority date | — |
| Expiry date | Jan 8, 2007 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF27D2019/0037
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One fast cool-down furnace embodiment discloses a double wall in the interspace of which a cooling air stream is flowable to provide fast cool-down of a load of wafers. The double wall embodiment is retrofittable on existing diffusion furnaces, and includes a cylindrical member aligned in concentric relation with the diffusion tube by combination plenum defining and supporting manifolds. In a second embodiment, the fast cool-down furnace includes a reaction vessel and a heating core relatively movable relative to each other in such a way that in a fast cool-down condition the core and reaction vessel are spaced apart. Cooling tubes are embedded in the movable core. Fans or other aids to cooling are provided. Operation is either in a controlled cool-down mode or in a quick quench mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.