Apparatus for plasma treatment of a sheet-like structure
US4803332A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1987 |
| Grant date | Feb 7, 1989 |
| Priority date | — |
| Expiry date | Jun 5, 2007 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C59/14
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A plasma treating apparatus for a sheet-like structure which comprises a generally drum-shaped first discharge electrode assembly rigidly mounted on a rotary shaft which extends through a vacuum vessel, the rotary shaft providing rotation to the electrode assembly. The sheet-like structure is adapted to follow the outer periphery of the first discharge electrode assembly. The apparatus further comprises a second discharge electrode assembly disposed within the vacuum chamber so as to confront the first discharge electrode assembly. The vacuum vessel is electrically insulated from an electric circuit which is connected to both of the first and second discharge electrode assemblies. Insulating members are also interposed between a cylindrical body of the drum of the first discharge electrode assembly and the rotary shaft to electrically insulate the first electrode assembly from the rotary shaft.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.