Piezoelectric actuator
US4803393A · kind A · utility
64Cited by
11References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 1987 |
| Grant date | Feb 7, 1989 |
| Priority date | — |
| Expiry date | Jul 14, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/503
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A piezoelectric actuator for moving an object member by utilizing a volume change of a piezoelectric element. The piezoelectric actuator includes a piezoelectric element, an envelope having a bellows or the like at least as a part of the wall, and a pressure chamber in which work oil is hermetically enclosed. Resiliency of the bellows or the like prevents breakdown of the piezoelectric element due to the supply of biased counter force, and highly improved sealing performance of the pressure chamber prevents leakage of the control oil.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.