Reactor system and method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane
US4805556A · kind A · utility
32Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 15, 1988 |
| Grant date | Feb 21, 1989 |
| Priority date | — |
| Expiry date | Jan 15, 2008 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/24
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
This invention relates to the manufacture of high-purity polycrystalline silicon rods by the pyrolysis of silane. More specifically, the present invention relates to an improved method for pyrolyzing monosilane to form high-quality polycrystalline rods of uniform diameter and to an improved pyrolysis reactor system for forming high-quality polycrystalline silicon rods of uniform diameter at high production rates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.