Installation and method for handling delicate objects in an atmosphere having a controlled dust content
US4805759A · kind A · utility
40Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 8, 1986 |
| Grant date | Feb 21, 1989 |
| Priority date | — |
| Expiry date | Dec 8, 2006 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67736
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an installation for conveying delicate objects such as semiconductor layers during processing operations and for handling such objects in a controlled atmosphere, wheeled carriages are drawn along tracks by an endless belt and are not driven by motors in order to satisfy conditions of cleanliness and freedom from pollution hazards. By means of transfer tools, object-holding cassettes are taken from the carriages during operation and replaced on the carriages after processing in the different machines.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.