Turbomolecular pump with improved bearing assembly
US4806075A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 1986 |
| Grant date | Feb 21, 1989 |
| Priority date | — |
| Expiry date | Dec 15, 2006 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C32/0685
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A single-ended turbomolecular vacuum pump operable in the free molecular flow pressure range having an improved bearing assembly located between the motor and the pump rotor discs is disclosed. The improved bearing assembly which is of the "plain" or "sleeve" liquid lubricated type with the bearing surfaces has a relatively high ratio of journal diameter to bearing axial length and includes lubricant ports radially disposed about both the centers of the bearing and the journal. The improved bearing assembly is characterized by improved heat transmission capabilities, high tolerance for misalignment, long life and significant reduction of pump vibration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.