Spatial phase modulating masks and production processes thereof, and processes for the formation of phase-shifted diffraction gratings
US4806442A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1986 |
| Grant date | Feb 21, 1989 |
| Priority date | — |
| Expiry date | Mar 20, 2006 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Spatial phase modulating transparent masks comprising two or more portions having two different optical paths and their production processes are disclosed. The transparent masks are particularly useful as an exposure mask in the production of phase-shifted, distributed feedback (DFB) semiconductor lasers for a single-mode operation. A process for the formation of phase-shifted diffraction gratings or corrugations which comprises exposing a substrate, through the above transparent mask, to exposure radiation is also disclosed. According to the present invention, the phase-shifted diffraction gratings can be easily and directly produced with a high accuracy and reliability.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.