Integrated semiconductor resistance temperature sensor and resistive heater
US4808009A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 1986 |
| Grant date | Feb 28, 1989 |
| Priority date | — |
| Expiry date | Jun 5, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/699
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An integrated sensing device includes a resistance temperature sensor formed in a semiconductor substrate and a resistance heater which is formed on an insulating layer which covers the surface of the semiconductor substrate. The resistance heater has a low temperature coefficient of resistivity and is positioned adjacent the resistance temperature sensor so the current flow through the resistance heater will generate heat which is transferred through the insulating layer to the resistance temperature sensor. The sensing device is applicable to a variety of sensing systems, such as mass flow measurement systems, dew point detection systems, and frost detection systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.