Patent · US Expired

Multiple-substance alloy for targets of cathode sputtering apparatus

US4808373A · kind A · utility

5Cited by

3References

3Claims

0Family size

Assignee

Leybold-Heraeus GmbH · DE

Inventors

Dieter Hoffman · Bruchköbel, DE
Wolf-Dieter Munz · Somborn, DE
G. A. Horst Siewert · Alzenau, DE
Horst Dietrich · Bad Orb, DE

Key dates

Filing date	Oct 20, 1986
Grant date	Feb 28, 1989
Priority date	—
Expiry date	Oct 20, 2006

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/34
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A multiple-substance alloy used as a target in a cathode sputtering apparatus, and having a gold content most preferably in the range of 94-98 percent by weight, is disclosed. The alloy further contains non-gold alloys of aluminum, copper and preferably an element of the group of Co, Ni, Ga, Ti, In, Cd, Sn, Fe and Pd.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.