Corrugated diaphragm for a pressure sensor
US4809589A · kind A · utility
28Cited by
3References
8Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 13, 1987 |
| Grant date | Mar 7, 1989 |
| Priority date | — |
| Expiry date | Feb 13, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0044
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The diaphragm comprises a peripheral zone (12) and a central zone (16) in the same plane. Between these zones there is a corrugated zone comprising 2n corrugated portions (18.sub.1 to 18.sub.4) which are separated by connection zones (20.sub.1 to 20.sub.4). Any one corrugated portion may be derived from the adjacent corrugated portion by a rotation through 180.degree. about the connection zone, or else by a rotation of 2.pi./2n about the diaphragm axis followed by a symmetry about the housing plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.