Image emission microscope with improved image processing capability
US4811090A · kind A · utility
52Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 4, 1988 |
| Grant date | Mar 7, 1989 |
| Priority date | — |
| Expiry date | Jan 4, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An emission microscope includes integrating and enhancing devices operating in parallel for optimizing the image of a scanned semiconductor device. Integration is terminated when sufficient clarity is acquired. The system further incorporates adaptive histogram matching using a noise distribution curve. Those pixels not meeting a predetermined intensity level are deleted to further enhance image display.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.