Copolymers having o-nitrocarbinol ester groups and preparation thereof

US4812542A · kind A · utility

Assignee

• BASF SE

Inventors

• Reinhold Schwalm · Monsheim, DE
• Horst Binder · Lampertheim, DE

Key dates

• Filing date: Dec 8, 1987
• Grant date: Mar 14, 1989
• Expiry date: Dec 8, 2007

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C08F212/24
• WIPO field: Macromolecular chemistry, polymers
• WIPO sector: Chemistry

Abstract

Copolymers containing from 5 to 50 mol % of monomers having o-nitrocarbinol ester groups, from 95 to 50 mol % of O-substituted p-hydroxystyrene and from 0 to 30 mol % of other copolymerizable monomers are useful for producing positive-working photoresists and light-sensitive coating materials.