Optoelectronic displacement sensor with correction filter
US4812635A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 27, 1987 |
| Grant date | Mar 14, 1989 |
| Priority date | — |
| Expiry date | Aug 27, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optoelectronic displacement sensor for the absolute measurement of displacement in the sub-micrometer range is described, which is constructed, according to an exemplary embodiment, with a light-emitting diode (L) as light source and two photodiodes (D1, D2), which are arranged in a difference circuit and which are opposite to one another, as radiation sensors. The sensing of displacement takes place by means of a diaphragm (2), which is displaceable between light source and radiation sensors and which influences the illumination received by of the photodiodes (D1, D2). For the homogenization of the illumination, special means are provided, which, according to an exemplary embodiment, consist of a correction filter (6) disposed in the beam path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.