Solid state gas pressure sensor
US4812801A · kind A · utility
9Cited by
7References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 14, 1987 |
| Grant date | Mar 14, 1989 |
| Priority date | — |
| Expiry date | May 14, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/12
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A solid state gas pressure sensor has a resistor of polysilicon deposited upon a dielectric substrate which electrically isolates and thermally prevents heat transfer to other devices thereon. A constant voltage is applied to the resistor. Depending upon the gas pressure over the sensor, a given current will be output once temperature equilibrium is established. A change in the gas pressure changes the output current of the resistor. The output current indicative of pressure is temperature corrected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.