Process for synthesis of diamond by CVD
US4816286A · kind A · utility
101Cited by
2References
6Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 27, 1987 |
| Grant date | Mar 28, 1989 |
| Priority date | — |
| Expiry date | Jul 27, 2007 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A synthesizing process for diamond by the chemical vapor phase growth method, characterized by converting an organic compound containing carbon, hydrogen and at least one of oxygen and nitrogen, to a gas phase, mixing the gas with hydrogen gas, decomposing the mixed gas by an energy of heat, electron beam, light, direct current glow discharge, alternating current glow discharge, or direct current arc discharge, and introducing the decomposed gas to the surface of a heated substrate (5) to deposit diamond on the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.