Robotic accessible wafer shipper assembly
US4817795A · kind A · utility
32Cited by
6References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 4, 1988 |
| Grant date | Apr 4, 1989 |
| Priority date | — |
| Expiry date | Mar 4, 2008 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S206/832
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A robotic accessible wafer shipper assembly comprises a shipper base, a wafer carrier which supports the disks within the base, and a shipper cover which mates with the base and wafer carrier in latching attachment. The base, carrier and cover are provided with certain specific design features which allow them to be handled, as a completely assembled package, by its constituent components and is assembled and disassembled entirely by robotics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.