Apparatus for passing workpieces into and out of a coating chamber through locks

US4820106A · kind A · utility

Assignee

• Leybold-Heraeus GmbH · DE

Inventors

• Michael Walde · Rodenbach, DE
• Jaroslav Zejda · Rodenbach, DE

Key dates

• Filing date: Sep 2, 1987
• Grant date: Apr 11, 1989
• Expiry date: Sep 2, 2007

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/139
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In an apparatus for passing a discoidal workpiece into and out of a coating chamber through a lock and for shifting the workpiece into and out of the range of a coating source, a swivelling arm is journaled for movement about a vertical axis on the top of the coating chamber. The ends of the swiveling arm have jacks bearing workpiece holding plates which transport the workpiece to an opening in the coating chamber. The workpiece holders are adapted to close off the opening from above. A turntable which can swivel about a vertical axis in the interior of the coating chamber has recesses on its top side for accommodating the workpieces. Lifting plates are journaled in these recesses and can be raised and lowered by lifting means in the bottom plate. The lifting plates are constructed such that, with the turntable in a first position, they pick up the workpieces in the area of the opening and at the same time close off the bottom of the opening, and in a second position they raise the workpieces into the range of action of a cathode.