Substituted o-phthalaldehydes
US4820829A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 8, 1987 |
| Grant date | Apr 11, 1989 |
| Priority date | — |
| Expiry date | Jan 8, 2007 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/0758
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
There are disclosed novel substituted o-phthalaldehydes of formula I ##STR1## wherein at least one of the substituents R.sub.1, R.sub.2, R.sub.3, R.sub.4 is Q(alkyl).sub.3, --CH.sub.2 --Q(alkyl).sub.3, --O--Q(alkyl).sub.3, --Q(aryl).sub.3 or --Q(alkylenearyl).sub.3, wherein Q is Si, Sn or Ge, the alkyl moieties contain 1 to 12 carbon atoms, the aryl groups contain 6 or 12 ring carbon atoms and the alkylene radicals contain 1 to 4 carbon atoms, and each of the remaining substituents R.sub.1 to R.sub.4 is a hydrogen or halogen atom or a cyano, nitro, carboxyl or hydroxyl group, a C.sub.1 -C.sub.4 alkoxy, C.sub.1 -C.sub.4 alkylthio or an alkoxycarbonyl group containing 1 to 4 carbon atoms in the alkoxy moiety. The novel o-phthalaldehydes can be polymerized to give polymers that can be used as photoresists.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.