Patent · US Expired

Resin packaged semiconductor device having a protective layer made of a metal-organic matter compound

US4821148A · kind A · utility

95Cited by
9References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 4, 1986
Grant dateApr 11, 1989
Priority date
Expiry dateJun 4, 2006

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/49121
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A silver electrode (4) on a lead frame (2) is bonded to an aluminum electrode (5) on a silicon chip (1) with a copper wire (3). The resulting semiconductor device was immersed in a solution of benzotriazole in ethyl alcohol. An Ag-benzotriazole film (6) was formed on the surface of the silver electrode (4) and a Cu-benzotriazole film (7) was formed on the surface of the copper wire (3), while an Al-benzotriazole film (8) was formed on the surface of the aluminum electrode (5). Even if water penetrates into the semiconductor device, the silver electrode (4), the aluminum electrode (5) and the copper wire (3) are effectively protected by the anti-corrosive Ag-benzotriazole film (6), Cu-benzotriazole film (7) and Al-benzotriazole film (8) to exhibit excellent damp-proof.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.