Capacitance manometer having stress relief for fixed electrode
US4823603A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 3, 1988 |
| Grant date | Apr 25, 1989 |
| Priority date | — |
| Expiry date | May 3, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved capacitance manometer includes a thin, electrically conductive diaphragm fixedly mounted to a housing. The diaphragm separates a first chamber that is subjected to a reference pressure from a second chamber that is subjected to a pressure that is to be measured relative to the reference pressure. The diaphragm flexes in response to a pressure differential between the two chambers. The diaphragm comprises one electrode of a variable capacitor. A second electrode of the variable capacitor is provided by a fixed electrically conductive area mounted on a ceramic disc or other fixed electrode support. The ceramic disc is mounted within the housing so that the electrically conductive area on the ceramic disc is proximate to and spaced apart from the diaphragm in generally parallel relationship to the diaphragm when the diaphragm is in a substantially relaxed condition (i.e., not flexed by a pressure differential). In order to prevent the ceramic disc and its associated conductive area from bending as the temperature changes, the ceramic disc is mechanically isolated from the housing by a roller bearing structure that preferably is a spherical or cylindrical electrical insulat…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.