Microbeam laser machine for acting on objects having thin layers of material
US4825034A · kind A · utility
15Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 22, 1987 |
| Grant date | Apr 25, 1989 |
| Priority date | — |
| Expiry date | Dec 22, 2007 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K26/082
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A microbeam laser machine for operating on objects having thin layers comprises a platen (14) which is rigid and undeformable and which has optical components mounted thereon defining a laser beam transmission path (34, 36, 38, 46), an illumination path (54, 55, 46), and an observation path (70, 74, 76). The invention is intended, in particular, for microoperations on integrated circuits and other objects having thin layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.