Electrical particle gun
US4825080A · kind A · utility
1Cited by
9References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 23, 1987 |
| Grant date | Apr 25, 1989 |
| Priority date | — |
| Expiry date | Sep 23, 2007 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/06
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electrical particle gun with applications in electronic and ionic microlithography for the integrated circuits industry comprises an emission chamber. In the emission chamber are a source adapted to emit the particles and devices for accelerating and focussing the particles. An exciter circuit is electrically connected to a decelerator electrode adjacent the focussing device. This enables pulsed emission of particles with an energy level lying within a predetermined band and filtering of the particles according to their energy level.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.